第21卷第6期2013年6月光学精密工程OpticsandPrecisionEngineeringVol.21No.6Jun.2013收稿日期:2013-01-29;修订日期:2013-03-15.基金项目:国家863高技术研究发展计划资助项目(No.2009AA0424071004-924X(201306-1503-07压电陶瓷微位移驱动器建模与控制刘泊,郭建英,孙永全*(哈尔滨理工大学测控技术与通信工程学院,黑龙江哈尔滨,150080摘要:考虑利用白光干涉仪进行表面三维形貌测量时压电陶瓷(P主题的蠕变效应对微位移驱动器位移精度的影响,提出了一种沿参考镜光轴方向提高该驱动器位移精度的方法。系统研究了该驱动器的位移检测回路、PID闭环控制以及蠕变补偿控制;利用光电位置传感器和光学杠杆调节位移检测回路,将压电陶瓷驱动器微位移反馈至控制系统,建立PID闭环控制。充分考虑了P主题蠕变特性对测量过程的影响,建立了"电压蠕变"补偿模型,实现了基于PID闭环控制与蠕变补偿控制相结合的复合控制方法。利用XL-80激光干涉仪测量压电陶瓷驱动器在PID闭环控制和复合控制二种情况下的微位移,实验结果显示前者位移误差为0.007μm,后者位移误差为0.005μm。结果表明该方法可有效克服压电陶瓷迟滞非线性和蠕变对测量结果的影响,满足表面三维形貌测量的高精度要求。关键词:压电陶瓷;位移驱动器;PID闭环控制;电压蠕变补偿:TP273文献标识码:Adoi:10.3788/OPE.20132106.1503ModelingandcontrolforP主题micro-displacementActuatorLIUBo,GUO激an-ying,SUNYong-quan*(CollegeofMeasurementControlTechnologyandCommunicationEngineering,HarbinUniversityofScienceandTechnology,Harbin150080,China*Correspondingauthor,E-mail:sunyongquan@sinaAbstract:Whenawhitelightinterferometerisappliedto3Dsurfacemicrocosmictopographicmeas-urement,themeasuringaccuracyiseffectedbythehysteresisandcreepingphenomenongeneratedbythepiezoelectricactuatorseriously.Therefore,thispaperproposesamethodtoimprovethedisplace-mentaccuracyofthereferencemirroralongtheopticalaxisdirection.Thepiezoelectricactuatorisgiv-en,anditsdisplacementdetectingcircuit,PIDclosedloopcontrolalgorithms,andcreepcompensationcontrolarestudied.First,displacementdetectingcircuitisestablishedbyapositionsensitivedeviceandanopticallever,bywhichthepiezoelectricceramicmicro-displacementcanbefedbacktocontrolthesystem,thenthePIDclosed-loopcontrolalgorithmisestablished.Furthermore,thecreepingcharacteristicsofpiezoelectricceramicisdiscussedduringthemeasurement.Inordertoeliminatethecreepingphenomenonandimprovemeasurementaccuracy,the“voltagecreep”compensationmodelisproposed.Finally,anintegercontrolsystembasedonPIDclosed-loopcontrolandcreepcompensationcontrolisestablished.Themicro-displacementofthepiezoelectricactuatorismeasuredbyahigh-pre-cisionXL-80laserinterferometerunderthetwocasesofPIDclosed-loopcontrolandintegercontrol.Experimentalresultsindicatethatthedisplacementerrorfortheformeris0.007μm,andthatforthelatteris0.005μm,respectively.Thismethodreducestheinfluenceofhysteresisandcreepingonmeasurementre-sults,andmeetstherequirementsofthree-dimensionedshapemeasurementforhighaccuracy.Keywords:piezoelectricceramics;displacementactuator;PIDcontrol;voltagecreepcompensation1引言微位移驱动器能够提供纳米级的位移输出,在光学工程、微电子工程、航空航天、生物工程、精密机械制造等领域有广泛的需求和应用[1]。压电陶瓷(P主题具有分辨率高、体积小、输出力大、频响高、不发热和响应速度快等优点,是微位移驱动器的首选驱动元件,在精密制造、精密测量中发挥着关键作用[2]。但P主题的迟滞、蠕变等非线性特性,使得测量精度降低,瞬态响应速度变慢,严重影响微位移工作台定位精度的提高[3]。利用前馈非线性迟滞模型的开环控制方法,从数学角度逼近压电陶瓷的迟滞特性曲线,是改善压电陶瓷迟滞非线性的有效途径之一,其关键是建立压...