.目录摘要..............................................................ⅠAbstract..........................................................Ⅱ第一章绪论......................................................11.1单晶硅的制备方法...............................................11.1.1区熔法....................................................11.1.2直拉法....................................................11.2直拉单晶硅的特点...............................................2第二章直拉单晶炉设备结构及保养与维护.............................32.1直拉单晶硅炉的结构.............................................32.2直拉单晶设备中的各类装置.......................................42.3直拉单晶炉保养和维修简介.......................................7第三章直拉单晶硅的工艺流程与常见故障处理.......................83.1直拉单晶硅的一般工艺流程.......................................83.2拉晶过程中的异常情况及处理....................................133.2.1熔硅过程中的异常情况及其处理.............................13.word版本..3.3.2硅跳.....................................................133.2.3突然停电及熔硅时未通水...................................143.3单晶炉常见故障...............................................14第四章单晶炉热场的研究和技术改进................................164.1直拉单晶炉的热场..............................................164.2直拉单晶炉热场控制系统........................................17结论..............................................................19参考文献..........................................................20致..............................................................21.word版本..直拉单晶硅设备与工艺研究摘要得益于全球光伏产业的高速发展，我国光伏产业近年来也迅速腾飞。目前，我国已经成为光伏产业大国，各地大力发展太阳能产业，许多单晶硅企业纷纷上马。研究和掌握单晶硅的制取工艺显得尤为重要。目前单晶硅制备的主要方法有直拉法与区熔法，而国大部分单晶硅都是采用直拉法制备的。直拉法生长单晶硅的设备和工艺比较简单，容易实现自动控制，生产效率高，易于制备大直径单晶，容易控制单晶中杂质浓度，可以制备低电阻单晶。本论文详细介绍了直拉单晶炉的结构与直拉单晶硅的工艺流程，并对实际生产中可能遇到的常见问题进行了分析，最后对一些关键工艺如热场设计方面提出自己的改进建议。关键词：直拉法；单晶硅；单晶炉；热场；工艺改进.word版本..CzochralskisilicondeviceandprocessresearchAbstractThankstotherapiddevelopmentoftheglobalPVindustry,thephotovoltaicindustryinChinainrecentyearstotakeoffquickly.Atpresent,Chinahasbecomealargephotovoltaicindustry,vigorouslydeveloparoundthesolarindustry,manyofmonocrystallinesiliconcompanieshavelaunched.Studyandmasterthemonocrystallinesiliconpreparationprocessisparticularlyimportant.ThemonocrystallinepreparedCzochralskimethod,zonemelting,whilemostofthedomesticmonocrystallineCzochralskiprepared.CzochralskimethodofgrowingmonocrystallineSidevicesandtheprocessisrelativelysimple,easytoachieveautomaticcontrol,high.word版本..productionefficiency,easytopreparealarge-diametersinglecrystal,easytocontroltheconcentrationofimpuritiesinthesinglecrystalcanbepreparedbyalow-resistancesinglecrystal.ThispaperdetailsthethetheCzochralskicrystalfurnacestructureandCzochralskisiliconprocess,commonproblemsencounteredandtheactualproductionmaylastsomekeyprocesses,suchasthedesignofthethermalfieldrecommendationsforimprovement.Keyword:Czochralski;Monocrystalline;Singlecrystalfurnace;Thermalfield;ProcessI...